Gas Panel Backfill Process
Original Publication Date: 1980-Jun-01
Included in the Prior Art Database: 2005-Feb-13
One of the steps following completion of gas panel fabrication is to apply a vacuum to the system to remove all contaminants in the panel prior to backfill with an ionizable gas. When the backfill system develops a leak, however, the entire vacuum and backfill system is shut down for repair. After the leak has been serviced, a problem still exists in bringing the system on line because of the contaminated getters in the backfill device.