Polysilicon Switches for Display Devices
Original Publication Date: 1980-Jun-01
Included in the Prior Art Database: 2005-Feb-13
In display devices in which the display effect is achieved by the use of materials without a switching threshold, it is necessary to provide a switch at each display element. Thin film transistors (TFTs) have been proposed for this function, and small area display panels have been demonstrated. However, the present TFT technology limits the device density and performance. This article proposes the use of polysilicon switches using evaporated-annealed polysilicon thin films on suitable substrates. The source and drain contacts are metal silicide/silicon junctions appropriate to the desired current carriers.