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Width Control of Fine Slits

IP.com Disclosure Number: IPCOM000055313D
Original Publication Date: 1980-Jun-01
Included in the Prior Art Database: 2005-Feb-13

Publishing Venue

IBM

Related People

Authors:
Marinace, JC [+details]

Abstract

Fine slits useful in the semiconductor fabrication techniques of resist masking, deposition and implantation masking, can be fabricated using piezoelectric, temperature and etching techniques.