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UHV Compatible Multi Hearth E-beam Source Programmed Electro Magnetic Power Supply Disclosure Number: IPCOM000055314D
Original Publication Date: 1980-Jun-01
Included in the Prior Art Database: 2005-Feb-13

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Bleakley, RH Chou, NJ Robinson, B Small, S [+details]


The commercially available multi-hearth E-beam source makes use of mechanically rotatable, multi (up to 4)-crucible arrangements, which limits the achievable vacuum to 10/-6/ torr (or worse). Our invention eliminates the mechanical parts, resulting in a better than 10/-10/ torr base pressure.