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A color projection display can be obtained by modifying the light reflection element of any silicon micromechanical array.
English (United States)
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Color Projection Deformographic Display using Silicon Micromechanics
and Optical Diffraction
A color projection display can be obtained by modifying the light reflection
element of any silicon micromechanical array.
In Fig. 1, a single cell of such a display has a diffraction grating applied upon
each deformographic element 10 (photolithographically, mechanically, etc.) such
that the lines are oriented perpendicularly to the deflection direction. All of the
metal stripes on the diffraction grating must be electrically connected to allow for
uniform deflection of each element 10. Also a corner-supported element gives
more uniform deflection which improves device characteristics.
Fig. 2 is a sectional view, taken along line 2-2 in Fig. 1, which gives a further
When the device is operated, the x and y address lines cause the grating
structure to deflect by a certain angle dependent on the charge stored on the
deflector. Light is diffracted from the grating into a lens system and is imaged
upon a screen. The angle of deflection (determined by the applied voltages)
controls the color of light diffracted through an aperture into the lens. Therefore,
different applied voltages will correspond to different colors on the screen.
References  K. E. Petersen, "Micromechanical Light Deflector Array," IBM
Technical Disclosure Bulletin 20, 355-6 (June 1977).  K. E. Petersen, "Optical
Light Modulation Array Fabricated on Silicon," Applied Physics Letters 31, 5...