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Contactless Self Aligned Memory Process Disclosure Number: IPCOM000055382D
Original Publication Date: 1980-Jul-01
Included in the Prior Art Database: 2005-Feb-13

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Fortino, AG Lee, HS Pricer, WD [+details]


A process for making a semiconductor memory of the type described in U. S. Patent 4,040,017 requires no contacts in the array and only five masks, and provides self-alignment of elements.