Purification of Deionized Water
Original Publication Date: 1980-Jul-01
Included in the Prior Art Database: 2005-Feb-13
With continuing miniaturization of integrated circuits, a need for improving the water purity has been felt in the electronic industry for some time. Currently, ion exchange methods of demineralization and reverse osmosis technology are used to purify water. Reverse osmosis water filtration is successful down to particle sizes of approximately 0.05 mu m. Recent investigations of wet cleaning processes indicate that a high carbon level is present in 16 to 18 M omega deionized water. These high carbon levels are responsible for poor surface cleaning efficiencies.