The following operators can be used to better focus your queries.
( ) , AND, OR, NOT, W/#
? single char wildcard, not at start
* multi char wildcard, not at start
(Cat? OR feline) AND NOT dog?
Cat? W/5 behavior
(Cat? OR feline) AND traits
Cat AND charact*
This guide provides a more detailed description of the syntax that is supported along with examples.
This search box also supports the look-up of an IP.com Digital Signature (also referred to as Fingerprint); enter the 72-, 48-, or 32-character code to retrieve details of the associated file or submission.
Concept Search - What can I type?
For a concept search, you can enter phrases, sentences, or full paragraphs in English. For example, copy and paste the abstract of a patent application or paragraphs from an article.
Concept search eliminates the need for complex Boolean syntax to inform retrieval. Our Semantic Gist engine uses advanced cognitive semantic analysis to extract the meaning of data. This reduces the chances of missing valuable information, that may result from traditional keyword searching.
Standard A-Cu evaporators with a centered E-gun source have shown a wide variation (+/-10 percent) in via-to-via edge coverage based on a normal sidewall coverage of 50 percent.
English (United States)
This text was extracted from a PDF file.
At least one non-text object (such as an image or picture) has been suppressed.
100% of the total text.
Page 1 of 2
Off Center E-Gun Deposition Source in Planetary Evaporation System
Standard A-Cu evaporators with a centered E-gun source have shown a
wide variation (+/-10 percent) in via-to-via edge coverage based on a normal
sidewall coverage of 50 percent.
The use of two off-centered E-gun sources for evaporation of A1-Cu has
been found to improve the edge coverage and improve thickness uniformity
values, while increasing productivity. The results show an improvement in via-to-
via edge coverage uniformity to +/-15 percent with an increase in the nominal
value of 4.5%. There is also an increase in thickness uniformity within a wafer
and from wafer to wafer across several runs.
Page 2 of 2
[This page contains 2 pictures or other non-text objects]