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Off Center E-Gun Deposition Source in Planetary Evaporation System

IP.com Disclosure Number: IPCOM000055401D
Original Publication Date: 1980-Jul-01
Included in the Prior Art Database: 2005-Feb-13

Publishing Venue

IBM

Related People

Authors:
Curry, WJ Dahlke, GP Galyon, GT Martin, HJ [+details]

Abstract

Standard A-Cu evaporators with a centered E-gun source have shown a wide variation (+/-10 percent) in via-to-via edge coverage based on a normal sidewall coverage of 50 percent.