Process for Recycling Hydrophilic Polymers
Original Publication Date: 1980-Jul-01
Included in the Prior Art Database: 2005-Feb-13
A family of hydrophilic polymers is useful for a wide variety of semiconductor and related process applications. These applications include: (1) the protection and cleaning of mask and wafers, (2) the reduction of surface treatment chemical usage, and (3) the cleaning of greensheet ceramics. When used for protecting and cleaning wafers and masks, the polymers are dispersed in an alcohol carrier and are applied as a liquid which dries to form a hard plastic coating. To remove the coating, the polymer is hydrated by the application of water to form a gel. The gelled polymer coating, containing the encapsulated contaminants, is then easily removed.