Data Compression for E-Beam Tool
Original Publication Date: 1980-Jul-01
Included in the Prior Art Database: 2005-Feb-13
As the complexity and density of E-beam manufactured chips increases, so also, does the volume of the data associated with these chips increase. This data must be transmitted from a control system to the E-beam tool in real time. As the requirements increase, faster means of transmitting the data would be desirable. Two alternatives to obtain a greater data rate are feasible: (1) use a new and faster control system, or (2) devise a data compaction scheme that gives an apparent higher data transfer rate.