Browse Prior Art Database

Automated Diffusion Length Measurement System

IP.com Disclosure Number: IPCOM000055427D
Original Publication Date: 1980-Jul-01
Included in the Prior Art Database: 2005-Feb-13

Publishing Venue

IBM

Related People

Authors:
Murty, K Schneider, CP [+details]

Abstract

A minority carrier diffusion length measurement system using a capacitive probe permits electrical measurements to be done in sequence either immediately after diffusion length measurement or at a later time at precisely the same spot on a silicon wafer.