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Automated Diffusion Length Measurement System Disclosure Number: IPCOM000055427D
Original Publication Date: 1980-Jul-01
Included in the Prior Art Database: 2005-Feb-13

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Murty, K Schneider, CP [+details]


A minority carrier diffusion length measurement system using a capacitive probe permits electrical measurements to be done in sequence either immediately after diffusion length measurement or at a later time at precisely the same spot on a silicon wafer.