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The use of laser-assisted etching and plating to enhance the plating and etching rate has been discussed elsewhere [*].
English (United States)
This text was extracted from a PDF file.
This is the abbreviated version, containing approximately
79% of the total text.
Page 1 of 1
Laser Enhanced Etching and Plating Employing High Viscosity Etching and
The use of laser-assisted etching and plating to enhance the plating and
etching rate has been discussed elsewhere [*].
This article is intended to explicitly point out a viscous or solid layer on top of
the working electrode and can be used as the confining electrolyte layer for
electrical conduction and hydrodynamic convection during laser-enhanced
plating/etching. The layer is heated locally with a focused laser for maximum
resolution of the resulting pattern. The heating is either direct, that is, by
absorption of optical energy within the layer, or by conduction resulting from the
heating of the workpiece, i.e., absorption of the light by the workpiece. In either
case, the heated electrolyte becomes less viscous or changes phase, from solid
to liquid, thereby becoming locally electrically conducting while simultaneously
agitated or stirred by hydrodynamic convection. Its chemical diffusion constant is
also increased due to its increase in temperature. By freezing the electrolyte and
locally melting, one obtains confinement of the area being plated or etched. By
increasing the viscosity of the electrolyte through the addition of inert polymers,
such as gelatinous materials, one accomplishes similar effects upon laser
This technique is also applicable to the plating of refractory metals which can
normally not be plated out of aqueous solution. In our proposed met...