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Compact Thickness Monitor for Metal Coaters Disclosure Number: IPCOM000055525D
Original Publication Date: 1980-Jul-01
Included in the Prior Art Database: 2005-Feb-13

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Kaplan, LH [+details]


This article describes an improved monitor for use with small evaporative coating systems which are generally used to metalize samples for scanning electron microscope (SEM) examination. Such systems are usually compact, the evacuated space being kept to a minimum to lessen sample turn-around time. Because they are limited capability tools, essentially dedicated to an SEM instrument, they also tend to be relatively inexpensive. Because of both of these considerations, such coaters are generally not equipped with externally read coating thickness monitors, since most such monitors are both expensive and bulky.