Browse Prior Art Database

Coating Solvent for Resist Films

IP.com Disclosure Number: IPCOM000055606D
Original Publication Date: 1980-Aug-01
Included in the Prior Art Database: 2005-Feb-13

Publishing Venue

IBM

Related People

Authors:
Moreau, WM Moyer, WA [+details]

Abstract

Resist coatings of uniform thickness and with no edge buildup are obtained by spin coating using a high boiling resist solvent such as bis-2-methoxyethyl ether.