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Combo Oil and Water Trap

IP.com Disclosure Number: IPCOM000055607D
Original Publication Date: 1980-Aug-01
Included in the Prior Art Database: 2005-Feb-13

Publishing Venue

IBM

Related People

Authors:
Carbone, Q Wernikowski, R [+details]

Abstract

In evaporation and RIE (reactive ion etching) units, oil-absorbant material captures backstreaming oil mist and does not allow oil to reach water-trapping pellets. It captures and holds the synthetic zeolite trapping pellets which breakdown, preventing them from entering the mechanical pump. Conventional traps have been handicapped by problems inherent in their construction. To alleviate these problems, a modified combo oil and water trap is illustrated in the drawing.