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Method for Fabricating Uniform Josephson Barrier Oxides by Cathode Rotation in an RF Plasma

IP.com Disclosure Number: IPCOM000055717D
Original Publication Date: 1980-Aug-01
Included in the Prior Art Database: 2005-Feb-13

Publishing Venue

IBM

Abstract

Josephson tunnel barrier oxides can be fabricated using a process which includes an RF oxygen plasma exited at 13.5 MHz, 360 Vp-p, and 10-20 mTorr 0(2).