Browse Prior Art Database

Method for Fabricating Uniform Josephson Barrier Oxides by Cathode Rotation in an RF Plasma Disclosure Number: IPCOM000055717D
Original Publication Date: 1980-Aug-01
Included in the Prior Art Database: 2005-Feb-13

Publishing Venue



Josephson tunnel barrier oxides can be fabricated using a process which includes an RF oxygen plasma exited at 13.5 MHz, 360 Vp-p, and 10-20 mTorr 0(2).