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Milling Machine Disclosure Number: IPCOM000055723D
Original Publication Date: 1980-Aug-01
Included in the Prior Art Database: 2005-Feb-13

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Prikas, MT Schmid, PE [+details]


The machining of parts in the 10-micrometer range, such as optical windows of silicon, and the removal of substrates are facilitated by providing a micrometer tool setting and an oscillating table.