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Spray Unit Disclosure Number: IPCOM000055767D
Original Publication Date: 1980-Sep-01
Included in the Prior Art Database: 2005-Feb-13

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Related People

Gagne, M [+details]


This is a spray unit which allows spray batch rinsing of wafers with the wafers being rotated during the rinsing action so that a more uniform rinsing of the wafer occurs.