Browse Prior Art Database

Spray Unit

IP.com Disclosure Number: IPCOM000055767D
Original Publication Date: 1980-Sep-01
Included in the Prior Art Database: 2005-Feb-13

Publishing Venue

IBM

Related People

Authors:
Gagne, M [+details]

Abstract

This is a spray unit which allows spray batch rinsing of wafers with the wafers being rotated during the rinsing action so that a more uniform rinsing of the wafer occurs.