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This is a split ring device that permits the non-adhesive mounting of transparent mask pellicles. Such pellicles protect the surface of the mask from dirt particles and remove such dirt particles from the mask focal plane.
English (United States)
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Non Adhesive Pellicle Mount (Bond) to Frame
This is a split ring device that permits the non-adhesive mounting of
transparent mask pellicles. Such pellicles protect the surface of the mask from
dirt particles and remove such dirt particles from the mask focal plane.
This device comprises a fixed ring 10 adhesively mounted on a mask 11 so
that it surrounds the active area from the mask 10 and a frame member 15. The
ring 10, square as shown, has rounded corners. The thin transparent pellicle 13
is stretched across the ring 10 so as to be smooth and parallel with mask 11.
The ring 10 is provided with a groove 14 which not only has rounded corners
but also has a generally smooth U-shaped cross section such that when the
frame member 15, having a T-shaped cross section, is positioned over the ring
14, the leg of the T will engage the groove 14 and lock the pellicle 13 between
the ring 10 and the member 15. As the leg of the frame member 15 enters the
groove it tensions the stretched pellicle 13 across the ring 10.
This permits a simple, fast, clean, cheap method of placing pellicles on
masks while eliminating the problems associated with adhesives.
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