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Non Adhesive Pellicle Mount (Bond) to Frame

IP.com Disclosure Number: IPCOM000055768D
Original Publication Date: 1980-Sep-01
Included in the Prior Art Database: 2005-Feb-13

Publishing Venue

IBM

Abstract

This is a split ring device that permits the non-adhesive mounting of transparent mask pellicles. Such pellicles protect the surface of the mask from dirt particles and remove such dirt particles from the mask focal plane.