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Cathode Assembly for Ion Source

IP.com Disclosure Number: IPCOM000055795D
Original Publication Date: 1980-Sep-01
Included in the Prior Art Database: 2005-Feb-13

Publishing Venue

IBM

Related People

Authors:
Bojarczuk, NA Kulak, JE Oldakowski, CC Schmidt, NT [+details]

Abstract

An arrangement is described for increasing ion gun performance and improving the controllability and mechanical access of its cathode assembly. In addition, the arrangement eliminates breakage of the vacuum to atmosphere electrical connection and gas seals.