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Sputtered Quartz Quality Test

IP.com Disclosure Number: IPCOM000055799D
Original Publication Date: 1980-Sep-01
Included in the Prior Art Database: 2005-Feb-13

Publishing Venue

IBM

Related People

Authors:
Lloyd, JR Roush, WB Sullivan, MJ [+details]

Abstract

The sputtered quartz used in the microelectronics industry for electrical insulation and passivation is a brittle glassy substance, and like all such materials contains numerous flaws. These flaws significantly effect the mechanical properties of the sputtered quartz, and they can also degrade the passivation and electrical properties. The number and distribution of these flaws is a function of many parameters, such as composition, sputtering voltage and frequency, resputtering rate, Ar pressure, etc.