Low TCR Polysilicon Thin Film Standard
Original Publication Date: 1980-Sep-01
Included in the Prior Art Database: 2005-Feb-13
It is often desirable to obtain a material with a low temperature coefficient of resistance (TCR) for use as a reference standard resistor in a changing thermal environment. In fact, a special class of metal alloys (i.e.. constant) has been developed for this purpose. Since the performance of these alloys is sensitive to the state of the metal (i.e. the stress state, purity, etc.) they are difficult to fabricate in thin film form.