Browse Prior Art Database

Fine Line Measurement System for a Scanning Electron Microscope

IP.com Disclosure Number: IPCOM000055816D
Original Publication Date: 1980-Sep-01
Included in the Prior Art Database: 2005-Feb-13

Publishing Venue

IBM

Related People

Authors:
Briody, RJ Grundon, FR Markgraf, AJ [+details]

Abstract

The system shown in the figure enables direct, high-accuracy and repeatable measurement of micron and submicron lines. The system solves the problem of drift magnification inherent in the scanning electron microscope (SEM), and thus eliminates the need for continual manual SEM calibration to a known standard.