Characterization Method of Silicon Wafers Based on Oxygen Precipitation Characteristics
Original Publication Date: 1980-Sep-01
Included in the Prior Art Database: 2005-Feb-13
This article describes a characterization method able to determine if a given wafer should be preferably processed either in a FET line or in a bipolar line. FET substrates need a great number of clusters to facilitate fast oxygen atom precipitation during thermal processing of the wafer while, on the other hand, bipolar products need a limited number of clusters to assure a low oxygen precipitation.