Chuck Cover Plate
Original Publication Date: 1980-Sep-01
Included in the Prior Art Database: 2005-Feb-13
Cover plate 4 of semiconductive material is arranged between metallic base plate 2 of vacuum chuck 1 and workpiece 3. As shown in section A cover plate 4 is provided with corresponding vacuum bores 5, and its surface is covered with a thin oxide layer 6. Oxide layer 6 acts as an electrical insulation between base plate 2 and workpiece 3, without reducing the thermal conductance of the semiconductive material of cover plate 4.