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Analysis of Mechanical Vibrations with NM Amplitudes

IP.com Disclosure Number: IPCOM000055838D
Original Publication Date: 1980-Sep-01
Included in the Prior Art Database: 2005-Feb-13

Publishing Venue

IBM

Related People

Authors:
Hinkel, H Kaus, G Kempf, J Wagner, H [+details]

Abstract

Mechanical vibrations of unknown frequency and amplitude (which are caused by shocks, environmental effects, etc.) often limit the accuracy obtainable with many modern analysis and manufacturing methods (e.g., depth profile analysis, using Secondary Ion Mass Spectroscopy (SIMS), Secondary Electron Microscopy (SEM), X-ray lithography).