Precision Aluminum Etching
Original Publication Date: 1980-Sep-01
Included in the Prior Art Database: 2005-Feb-13
This arrangement provides a means of achieving an aluminum pattern 10 of a specific resistance at a specific temperature on a wafer 12. The result is a resistance thermometer on a chip surface. For example, pure aluminum is used which has a temperature coefficient of resistivity of approximately 0.39 percent/degrees C.