Browse Prior Art Database

Technique for Reducing Oxidation Enhanced Diffusion Disclosure Number: IPCOM000055919D
Original Publication Date: 1980-Sep-01
Included in the Prior Art Database: 2005-Feb-13

Publishing Venue


Related People

Crowder, BL Fortino, AG Geipel, HJ [+details]


This article describes a method wherein the physical phenomenon of oxidation-enhanced diffusion of boron can be reduced and sharper boron profiles obtained even when the post-processing includes oxidation.