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Technique for Reducing Oxidation Enhanced Diffusion

IP.com Disclosure Number: IPCOM000055919D
Original Publication Date: 1980-Sep-01
Included in the Prior Art Database: 2005-Feb-13

Publishing Venue

IBM

Related People

Authors:
Crowder, BL Fortino, AG Geipel, HJ [+details]

Abstract

This article describes a method wherein the physical phenomenon of oxidation-enhanced diffusion of boron can be reduced and sharper boron profiles obtained even when the post-processing includes oxidation.