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Resistance and Dimension Characterization Via Kerf Automatic in Line Tests

IP.com Disclosure Number: IPCOM000056038D
Original Publication Date: 1980-Oct-01
Included in the Prior Art Database: 2005-Feb-13

Publishing Venue

IBM

Related People

Authors:
Basire, D [+details]

Abstract

In VLSI (very large-scale integration) technologies, the electrical behavior of any device (resistor, diode, transistor) strongly depends not only on the process (vertical) profile, but also on the geometrical (horizontal) dimensions. The dimension tolerances can even dominate over process tolerances.