Process for Fabricating Membrane Nozzles
Original Publication Date: 1980-Oct-01
Included in the Prior Art Database: 2005-Feb-13
Present membrane nozzle technology utilizes anisotropically etched silicon with either a thermal oxide or deposited SiC membrane. Performance of the Si-SiO(2) nozzles is excellent. However, the corrosion of these nozzles in the presence of the presently used ink is intolerable.