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High Resolution Projection Photolithography System Employing Conjugate Wavefront Generation

IP.com Disclosure Number: IPCOM000056115D
Original Publication Date: 1980-Aug-01
Included in the Prior Art Database: 2005-Feb-13

Publishing Venue

IBM

Related People

Authors:
Levenson, MD [+details]

Abstract

A high resolution projection photolithography system employing a conjugate wave generator 12 is shown in the drawing.