Browse Prior Art Database

Electron Energy Discriminator for Wafer Chip Testing

IP.com Disclosure Number: IPCOM000056182D
Original Publication Date: 1980-Nov-01
Included in the Prior Art Database: 2005-Feb-14

Publishing Venue

IBM

Related People

Authors:
Lukianoff, GV [+details]

Abstract

This article describes a unit to be used for contactless electrical testing of integrated circuits on wafers or chips. The testing is to be performed by electron beam instruments (e.g. Scanning Electron Microscope) operated in the voltage measurement mode.