Method to Improve Yield of the Array Chips which use Ion-Implanted Resistors
Original Publication Date: 1980-Nov-01
Included in the Prior Art Database: 2005-Feb-14
Experiments have shown that the value of an ion-implanted resistor varies with the voltage of a metal plate or metal stripe covering at least a part of its body. Fig. 1 shows the setup which can cause these results. A potential of +5 volts voltage on the plate can increase the resistance of a 4 K omega/square resistor by +10%. Increasing the plate voltage to 50 volts increases the resistance of the resistor by +30%. Similarly if negative voltage is applied, -5 volts in plate voltage changes the resistance value of the resistor by -10% and -50 volts decreases the resistor value by 30%. As shown in Fig. 2, a resistor having a nominal resistance of 3.5 K omega can vary between 20 and 30 percent depending on the plate voltage.