Browse Prior Art Database

Reactive Plasma Deposited Silicon Membrane Nozzle

IP.com Disclosure Number: IPCOM000056286D
Original Publication Date: 1980-Nov-01
Included in the Prior Art Database: 2005-Feb-14

Publishing Venue

IBM

Related People

Authors:
Acedo, HA Anger, F Liclican, LC [+details]

Abstract

An improved method for making a silicon membrane ink jet nozzle is described.