Browse Prior Art Database

Immobilization and Flattening of Silicon Wafers

IP.com Disclosure Number: IPCOM000056292D
Original Publication Date: 1980-Nov-01
Included in the Prior Art Database: 2005-Feb-14

Publishing Venue

IBM

Related People

Authors:
Lowe, AC [+details]

Abstract

The use of silicon wafers with liquid crystal devices has been handicapped by the wafers not being sufficiently flat and by not being sufficiently rigid to maintain a given flatness when subjected to thermal or pressure fluctuations.