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Immobilization and Flattening of Silicon Wafers Disclosure Number: IPCOM000056292D
Original Publication Date: 1980-Nov-01
Included in the Prior Art Database: 2005-Feb-14

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Lowe, AC [+details]


The use of silicon wafers with liquid crystal devices has been handicapped by the wafers not being sufficiently flat and by not being sufficiently rigid to maintain a given flatness when subjected to thermal or pressure fluctuations.