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Evaporator Sputter Shield

IP.com Disclosure Number: IPCOM000056305D
Original Publication Date: 1980-Nov-01
Included in the Prior Art Database: 2005-Feb-14

Publishing Venue

IBM

Related People

Authors:
Horky, G [+details]

Abstract

An evaporator-sputter shield 1 of louvered aluminum material (Fig. 1) with stationary fins 2 is disposed within a bell jar 3 (Fig. 2) of a vacuum deposition apparatus 4. This type of material desirably provides a readily replaceable, inexpensive and light weight evaporator-sputter shield. This type of material can also be inserted in an outer viewing port 5. This desirably permits viewing of the interior of the bell jar 3, while blocking out heat and light and stray deposition material.