Perforated Counter Electrode For Flexible Diode RIE System
Original Publication Date: 1980-Nov-01
Included in the Prior Art Database: 2005-Feb-14
A perforated aluminum plate has been introduced as the counter-electrode in a flexible diode system, as shown in the figure, including a quartz window 10, an RF feed-through 12, a 1/4-inch-thick aluminum plate with 1/4-inch perforations 14, substrates 16 and a standard RF cathode 18. A flexible diode system is used to etch polysilicon selectively down to gate oxide in an FET process. The electrode commonly used in a two electrode reactor is comprised of a solid, water-cooled electrode, usually copper. A quartz disc is bonded to the front surface of the electrode, and the back is protected from sputtering by a conformal ground plane.