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Method of Reducing Resist Splashback While Spinning On A Resist Coating

IP.com Disclosure Number: IPCOM000056320D
Original Publication Date: 1980-Nov-01
Included in the Prior Art Database: 2005-Feb-14

Publishing Venue

IBM

Abstract

In order to reduce resist splashback at the corners of square mask plates while spinning on a resist coating, a baffle disk is supported close to the surface of the mask plate and air is permitted to enter over the baffle disk and flow across the disk and out an exhaust port.