Pellicle Ring Adhesive Using Durepoly
Original Publication Date: 1980-Dec-01
Included in the Prior Art Database: 2005-Feb-14
The use of double-sided foam tape to mount pellicle rings to masks results in the generation of particulate matter which migrates to the mask pattern surface. The replacement of double-sided foam tape with a hydrophilic polymer resin, such as DUREPOLY* solves this problem.