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High Pressure Sputtered Metal Disclosure Number: IPCOM000056402D
Original Publication Date: 1980-Dec-01
Included in the Prior Art Database: 2005-Feb-14

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Curry, WJ Galyon, GT Giddings, JJ Prizzia, TC [+details]


This article is directed to the disclosure of a process for the elimination of cusping defects which occur during metal deposition by a sputtering process. The cusping problem is eliminated by the use of higher than normal pressures during the sputtering operation.