Browse Prior Art Database

High Pressure Sputtered Metal

IP.com Disclosure Number: IPCOM000056402D
Original Publication Date: 1980-Dec-01
Included in the Prior Art Database: 2005-Feb-14

Publishing Venue

IBM

Related People

Authors:
Curry, WJ Galyon, GT Giddings, JJ Prizzia, TC [+details]

Abstract

This article is directed to the disclosure of a process for the elimination of cusping defects which occur during metal deposition by a sputtering process. The cusping problem is eliminated by the use of higher than normal pressures during the sputtering operation.