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MLC Pad Surface Preparation by Dry HF Processing Disclosure Number: IPCOM000056405D
Original Publication Date: 1980-Dec-01
Included in the Prior Art Database: 2005-Feb-14

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Mathad, GS Purcell, ED Viswanathan, NS [+details]


A process is described for the selective etching of glass in molybdenum pads on MLC (multilayer ceramic) substrates in a controllable and clean way, such that the surface of the pads is prepared for subsequent nickel plating.