Browse Prior Art Database

Self Aligned Contact to a Doped Region

IP.com Disclosure Number: IPCOM000056412D
Original Publication Date: 1980-Dec-01
Included in the Prior Art Database: 2005-Feb-14

Publishing Venue

IBM

Related People

Authors:
Lo, TC [+details]

Abstract

This is a self aligned contact to a doped region useful in integrated circuit fabrication.