High Resolution Image Sensing Device
Original Publication Date: 1980-Dec-01
Included in the Prior Art Database: 2005-Feb-14
A higher resolution solid-state image sensor can be achieved by the use of V-groove etching technology. The use of the V-groove isolation technique between the adjacent photosensors reduces the total chip area (thus increasing density), lowers the crosstalk between adjacent photo-diodes where the crosstalk path is blocked by the V-groove, and improves the spatial frequency response of the image sensor.