Method for Forming Uniformly Distributed Precipitates in Thin Films
Original Publication Date: 1980-Dec-01
Included in the Prior Art Database: 2005-Feb-14
A method for forming uniformly distributed precipitates in thin films is described. Metals with different lattice parameters are sequentially deposited. The difference in lattice parameters creates a dislocation network. Upon heat treatment of the resulting films, precipitates nucleate on the dislocation network.