Methods for Displaying Defocus and Astigmatism of High Resolution Stem Images
Original Publication Date: 1980-Dec-01
Included in the Prior Art Database: 2005-Feb-14
Focussing and stigmation of the objective lens for high resolution STEM (Scanning Transmission Electron Microscope) imaging is usually achieved by repeated reduced area scans of a given specimen area under manual control of the instrument. This method is particularly laborious since the scan times for images can be upwards of several seconds, which subjects a specimen to unwanted electron beam exposure.