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Hypersound Generation and Detection Disclosure Number: IPCOM000056589D
Original Publication Date: 1988-Jan-01
Included in the Prior Art Database: 2005-Feb-14

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Pohl, WD [+details]


Non-destructive testing of surface and sub-surface structures by sound waves is a well-established technique. Yet the resolution achievable with this technique is limited roughly to the wavelength of the sound waves used. In view of the difficulty of handling sound waves with a wavelength of 30 nm, corresponding to a frequency of 1 THz, this technique does not seem to lend itself to the testing of very small structures, such as VLSI circuits. In a double-tip scanning tunneling microscope arrangement, two tunnel tips 1 and 2 are attached to a pair of cantilevers 3 and 4 extending from a common body 5 which is fixed to an xy-scanner 6 for scanning movement across the surface of a sample 7.