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Resilient Surfaced Vacuum Chuck

IP.com Disclosure Number: IPCOM000056662D
Original Publication Date: 1988-Jan-01
Included in the Prior Art Database: 2005-Feb-14

Publishing Venue

IBM

Related People

Authors:
Ask, RG Dose, CB Fox, DL Speer, SR [+details]

Abstract

Damage to the substrate in the manufacture of rigid magnetic disks is greatly reduced by using a resilient surfaced vacuum chuck to hold the disk during diamond cutting operation on the surface of the disk. The chuck is a aluminum turntable with a layer of monothane. Holes through the chuck and monothane layer allow a vacuum applied at the underside of the turntable to draw the work disk tightly against the monothane layer. The figure shows a chuck 10 with a work disk 12 positioned just above the chuck so the chuck can be seen. The chuck consists of an aluminum turntable 14 with a monothane layer 16 coated thereon. The monothane layer has a thickness of 1/8 inch (3.17 mm) and a hardness in the range of 90-100 Shore A.