Algorithms for Creation of Inspected Photo Limited Yield Compatible Data
Original Publication Date: 1988-Jan-01
Included in the Prior Art Database: 2005-Feb-14
This system and algorithm automatically derive Inspected Photo Limited Yield (IPLY) compatible data from functional testing. This approach requires minimal manual intervention as compared with previous methods which require the manual conversion of the device location to wafer coordinates when testing semiconductor devices. In fail mode diagnostics procedures used in manufacturing semiconductor devices a critical stage is IPLY analysis, which involves the unlayering of wafers and physical examination of device components using a microscope. Previous methods included a manual analysis of functional test data to define cell locations which require further examination. This system and the algorithms automatically generate the coordinates of appropriate failing cells.