Improved Process Monitors for Open and Short Circuit Conditions
Original Publication Date: 1988-Jan-01
Included in the Prior Art Database: 2005-Feb-14
Process monitor geometries for open and short circuit conditions are described. The new geometries feature large pads at monitor line ends or turning points to assure that these regions of monitors are not critical failure points. The figure shows a geometry for a combined monitor of open and short circuit conditions. An open circuit monitor is constructed of a series of narrow lines 2 connected by wide line segments 4 and terminating at test pads 10 and 12. The opens monitor also serves as a first terminal for a short circuit monitor. A second terminal for the short circuit monitor is comprised of a set of narrow lines 6 interleaved between lines 2 and connected at one end to wide line 8 terminating at test pad 14.