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Evaporation Dome Shipping Container Disclosure Number: IPCOM000056917D
Original Publication Date: 1988-Feb-01
Included in the Prior Art Database: 2005-Feb-14

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Gutta, RS Kopecky, HR Uberbacher, C Walsh, TJ [+details]


This molded plastic shipping container aids identification, storage, and transport of evaporation domes used in semiconductor device fabrication. The container permits safe handling of domes of different shapes and sizes, including those requiring separate cleaning operations. The Balzer evaporation dome, shown on the left side of Fig. 1, weighs 8.9 Kgrams or 19.5 pounds, while the ULVAC evaporation dome, shown on the right weighs 5.5 Kgrams, or 12.0 pounds. The Balzer dome measures 9.0 cms in height and 81.0 cms in diameter, while the ULVAC dome measures 10.5 cms in height and 76.0 cms in diameter. The meter stick included in Fig. 1 illustrates the size. Both domes are expensive and must be chemically cleaned rather frequently. Safe transport and storage are vital.